Introduction to Microfabrication and MEMS (January 2025): Revision history

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6 February 2025

30 January 2025

  • curprev 12:4112:41, 30 January 2025Theresa De Leon talk contribs 3,933 bytes +3,933 Created page with "'''ECE 197U / EE 298U Introduction to Microfabrication and MEMS''' * 2nd Semester AY 2024-2025 * 3 units lecture, 1 unit laboratory == Course Description == ECE 197U / EE 298U is designed to introduce students to the fundamentals of microfabrication and its applications in integrated circuits (ICs) and microelectromechanical systems (MEMS). The lectures discuss the theories behind standard microfabrication processes. The laboratory class then demonstrates these theories..."