Introduction to Microfabrication and MEMS (January 2025): Difference between revisions
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(Created page with "'''ECE 197U / EE 298U Introduction to Microfabrication and MEMS''' * 2nd Semester AY 2024-2025 * 3 units lecture, 1 unit laboratory == Course Description == ECE 197U / EE 298U is designed to introduce students to the fundamentals of microfabrication and its applications in integrated circuits (ICs) and microelectromechanical systems (MEMS). The lectures discuss the theories behind standard microfabrication processes. The laboratory class then demonstrates these theories...") |
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ECE 197U / EE 298U is designed to introduce students to the fundamentals of microfabrication and its applications in integrated circuits (ICs) and microelectromechanical systems (MEMS). The lectures discuss the theories behind standard microfabrication processes. The laboratory class then demonstrates these theories through hands-on experiments using actual microfabrication materials and equipment. Pre-req: Must have taken EEE 41 (Introduction to Semiconductor Devices and Circuits) or EEE 131 (Electronic Devices and Circuits) or equivalent courses | ECE 197U / EE 298U is designed to introduce students to the fundamentals of microfabrication and its applications in integrated circuits (ICs) and microelectromechanical systems (MEMS). The lectures discuss the theories behind standard microfabrication processes. The laboratory class then demonstrates these theories through hands-on experiments using actual microfabrication materials and equipment. Pre-req: Must have taken EEE 41 (Introduction to Semiconductor Devices and Circuits) or EEE 131 (Electronic Devices and Circuits) or equivalent courses | ||
== Course | == Course Outcomes == | ||
At the end of this course, students should be able to: | At the end of this course, students should be able to: | ||
# Understand fundamental principles of device microfabrication and technology | # Understand fundamental principles of device microfabrication and technology | ||
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'''Module 1: Course Introduction''' | '''Module 1: Course Introduction''' | ||
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Lecture | [https://drive.google.com/file/d/15lgRKbLNgP7yvEsZKrMGsaezMWHq2uDk/view?usp=sharing Lecture 0a: Course Introduction]<br> | ||
[https://drive.google.com/file/d/1zhmHOs3rIS02LsWwTGwx2wIoYWHHEQ5A/view?usp=drive_link Lecture 0b: Cleanroom Orientation] | |||
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Lecture 1: Introduction to Microfabrication | [https://drive.google.com/file/d/1ZLKizDyjc2tkmXTSxLbwwIRgT1DbXERD/view?usp=sharing Lecture 1: Introduction to Microfabrication] | ||
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'''Module 2: Cleaning and Oxidation''' | '''Module 2: Cleaning and Oxidation''' | ||
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Lecture 2: Microfabrication and MEMS in UPD | [https://drive.google.com/file/d/13gkETbiL3nfEkCFypy2ASMZHkJwTG11v/view?usp=drive_link Lecture 2: Microfabrication and MEMS in UPD] | ||
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Lecture | [https://drive.google.com/file/d/1ztZ_l3BtWUG9EsoNeXN6CtK1OBDHGD44/view?usp=drive_link Lecture 3a: Silicon Fabrication]<br> | ||
[https://drive.google.com/file/d/1TPqJx0rXsRCAldNX-0L8gzNb3GIJfqcC/view?usp=drive_link Lecture 3b: Cleaning Process] | |||
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[https://drive.google.com/file/d/1gcqnuWbfJG2JjJab8fkXzcvAQFVx1A-q/view?usp=drive_link RCA Cleaning] | |||
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| style="text-align:center;" | Week 3 (02/03 - 02/07) | | style="text-align:center;" | Week 3 (02/03 - 02/07) | ||
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'''Module 3: Oxidation Process''' | '''Module 3: Oxidation Process''' | ||
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Lecture | [https://drive.google.com/file/d/1aXjGjgobxFjJ2cCcHMNTfKC8V4BWLL6H/view?usp=drive_link Lecture 4: Oxidation Processes] <br> | ||
(Guest Lecture: UPD DMMME Asst. Prof. Rogel Butalid) | |||
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Seatwork | Seatwork No. 1 | ||
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'''Module 4: Photolithography''' | '''Module 4: Photolithography''' | ||
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Lecture 5: Photolithography Part 1 | [https://drive.google.com/file/d/1qDtQfnTwgCEIqY9ueUBUtR1IX6mR-2gk/view?usp=sharing Lecture 5: Photolithography Part 1] | ||
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Lecture 6: Photolithography Part 2 | [https://drive.google.com/file/d/1hJh3CshUEPGUUJ-FmOhgHy5hMJBhRP6p/view?usp=sharing Lecture 6: Photolithography Part 2] | ||
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'''Module 5: Deposition Processes''' | '''Module 5: Deposition Processes''' | ||
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[https://drive.google.com/file/d/1_ttysM8xNvHAABkVMbrHx9BGdfYdccfF/view?usp=sharing Lecture 7: Wet Deposition Processes] | |||
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Lecture | [https://drive.google.com/file/d/1itd5iOFrJy49blB6Jvhjbd-WjO4V3Rrr/view?usp=sharing Lecture 8: Dry Deposition Processes] | ||
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[https://drive.google.com/file/d/1evswMtNKy0GEuq-2GD155RD9QD_JY19B/view?usp=sharing MatE 197 Doping Lecture] | |||
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| style="text-align:center;" | Week 6 (02-24 - 02/28) | | style="text-align:center;" | Week 6 (02-24 - 02/28) | ||
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HOLIDAY | HOLIDAY | ||
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Seatwork No. 2 | |||
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'''Module 6: Etching Processes''' | '''Module 6: Etching Processes''' | ||
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Lecture 9: Etching Processes | [https://drive.google.com/file/d/1j88D-lRyoE-SJ0I9oswTUJcLyJFVnFCM/view?usp=sharing Lecture 9: Etching Processes] | ||
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Seatwork | Seatwork No. 3 | ||
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'''Module 7: Characterization Processes''' | '''Module 7: Characterization Processes''' | ||
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Lecture 10: Electrical Characterization | [https://drive.google.com/file/d/1nKdRYNWpvzk4sR2i6RakZUm4YrcXnPxh/view?usp=sharing Lecture 10: Electrical Characterization] | ||
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Lecture 11: Optical Characterization | [https://drive.google.com/file/d/1nDRkdf7dgR5Lsr9Ab9f_HB3juA3RRDWg/view?usp=sharing Lecture 11: Optical Characterization] | ||
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'''Module 8: Packaging and Assembly''' | '''Module 8: Packaging and Assembly''' | ||
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Seatwork | Seatwork No. 4 | ||
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Lecture 12: | [https://drive.google.com/file/d/1vRnDg227XU15tONNkc5v2X6Y30MJ30dH/view?usp=sharing Lecture 12: Packaging] | ||
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'''Module 8: Packaging and Assembly (continued)''' | '''Module 8: Packaging and Assembly (continued)''' | ||
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Lecture 13: Assembly | [https://drive.google.com/file/d/1K9fZ0bwYRZTsj10BUNcXZWJDh_OY9BPU/view?usp=sharing Lecture 13: Assembly] | ||
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Lecture 14: MUMPS and CMOS Processes | [https://docs.google.com/presentation/d/15McOgSjlWMZoTIyZ0NBsuRKR8xJudQaz/edit?usp=sharing&ouid=117156915761919838910&rtpof=true&sd=true Lecture 14: MUMPS and CMOS Processes] | ||
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'''Module 9: Introduction to MEMS''' | '''Module 9: Introduction to MEMS''' | ||
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HOLIDAY | |||
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Lecture | [https://drive.google.com/file/d/1EQiK-FX9uruQzidnnxePJzwNpt-xeGXX/view?usp=sharing Lecture 15: Introduction to MEMS] | ||
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'''Module 10: Final Project''' | '''Module 10: Final Project''' | ||
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Lecture | [https://drive.google.com/file/d/1DJyrTZzcmoqHQO-N2aK43WyihIe2NSLx/view?usp=sharing Lecture 16: Cantilevers in MEMS] | ||
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Project Introduction | |||
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Latest revision as of 09:34, 10 April 2025
ECE 197U / EE 298U Introduction to Microfabrication and MEMS
- 2nd Semester AY 2024-2025
- 3 units lecture, 1 unit laboratory
Course Description
ECE 197U / EE 298U is designed to introduce students to the fundamentals of microfabrication and its applications in integrated circuits (ICs) and microelectromechanical systems (MEMS). The lectures discuss the theories behind standard microfabrication processes. The laboratory class then demonstrates these theories through hands-on experiments using actual microfabrication materials and equipment. Pre-req: Must have taken EEE 41 (Introduction to Semiconductor Devices and Circuits) or EEE 131 (Electronic Devices and Circuits) or equivalent courses
Course Outcomes
At the end of this course, students should be able to:
- Understand fundamental principles of device microfabrication and technology
- Appreciate cleanroom operation, laboratory safety, and chemical handling principles
- Learn the basics of the operation of fabrication equipment in the UP Diliman Microfabrication Facility
- Learn the fundamentals and applications of MEMS devices
- Create a fabrication process plan from existing MEMS devices in the literature
Lecture Schedule
| Calendar | Lecture Module | Topic 1 | Topic 2 | Resources |
|---|---|---|---|---|
| Week 1 (01/20 - 01/24) |
Module 1: Course Introduction |
Lecture 0a: Course Introduction |
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| Week 2 (01/27 - 01/31) |
Module 2: Cleaning and Oxidation |
Lecture 3a: Silicon Fabrication |
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| Week 3 (02/03 - 02/07) |
Module 3: Oxidation Process |
Lecture 4: Oxidation Processes |
Seatwork No. 1 |
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| Week 4 (02/10 - 02/14) |
Module 4: Photolithography |
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| Week 5 (02/17 - 02/21) |
Module 5: Deposition Processes |
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| Week 6 (02-24 - 02/28) |
Module 5: Deposition Processes (continued) |
HOLIDAY |
Seatwork No. 2 |
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| Week 7 (03/03 - 03/07) |
Module 6: Etching Processes |
Seatwork No. 3 |
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| Week 8 (03/10 - 03/14) |
Module 7: Characterization Processes |
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| Week 9 (03/17 - 03/21) |
Module 8: Packaging and Assembly |
Seatwork No. 4 |
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| Week 10 (03/24 - 03/28) |
Module 8: Packaging and Assembly (continued) |
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| Week 11 (03/31 - 04/04) |
Module 9: Introduction to MEMS |
HOLIDAY |
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| Week 12 (04/07 - 04/11) |
Module 10: Final Project |
Project Introduction |
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| Week 13 (04/14 - 04/18) |
Lenten Break |
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| Weeks 14-16 (04/21 - 05/09) |
Final Project Consultations |
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| Finals Week (05/26 - 05/30) |
Final Project Presentations |
References
- R. Jaeger, Introduction to Microelectronic Fabrication, Prentice Hall, 2002.
- S. Senturia, Microsystem Design, Springer, 2004.
- W. Schomburg, Introduction to Microsystem Design, Springer, 2011.
- K. Lee, Principles of Microelectromechanical Systems, Wiley-IEEE, 2011.