Introduction to Microfabrication and MEMS (January 2025): Difference between revisions

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'''Module 3: Oxidation Process'''
'''Module 3: Oxidation Process'''
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Lecture 4: Oxidation Processes <br>
[https://drive.google.com/file/d/1aXjGjgobxFjJ2cCcHMNTfKC8V4BWLL6H/view?usp=drive_link Lecture 4: Oxidation Processes] <br>
(Guest Lecture: UPD DMMME Asst. Prof. Rogel Butalid)
(Guest Lecture: UPD DMMME Asst. Prof. Rogel Butalid)
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Seatwork
Seatwork No. 1
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'''Module 4: Photolithography'''
'''Module 4: Photolithography'''
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Lecture 5: Photolithography Part 1
[https://drive.google.com/file/d/1qDtQfnTwgCEIqY9ueUBUtR1IX6mR-2gk/view?usp=sharing Lecture 5: Photolithography Part 1]
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Lecture 6: Photolithography Part 2
[https://drive.google.com/file/d/1hJh3CshUEPGUUJ-FmOhgHy5hMJBhRP6p/view?usp=sharing Lecture 6: Photolithography Part 2]
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'''Module 5: Deposition Processes'''
'''Module 5: Deposition Processes'''
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Seatwork
[https://drive.google.com/file/d/1_ttysM8xNvHAABkVMbrHx9BGdfYdccfF/view?usp=sharing Lecture 7: Wet Deposition Processes]
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Lecture 7: Wet Deposition Processes
[https://drive.google.com/file/d/1itd5iOFrJy49blB6Jvhjbd-WjO4V3Rrr/view?usp=sharing Lecture 8: Dry Deposition Processes]
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[https://drive.google.com/file/d/1evswMtNKy0GEuq-2GD155RD9QD_JY19B/view?usp=sharing MatE 197 Doping Lecture]
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| style="text-align:center;" | Week 6 (02-24 - 02/28)
| style="text-align:center;" | Week 6 (02-24 - 02/28)
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HOLIDAY
HOLIDAY
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Lecture 8: Dry Deposition Processes
Seatwork No. 2
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'''Module 6: Etching Processes'''
'''Module 6: Etching Processes'''
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Lecture 9: Etching Processes
[https://drive.google.com/file/d/1j88D-lRyoE-SJ0I9oswTUJcLyJFVnFCM/view?usp=sharing Lecture 9: Etching Processes]
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Seatwork
Seatwork No. 3
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'''Module 7: Characterization Processes'''
'''Module 7: Characterization Processes'''
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Lecture 10: Electrical Characterization
[https://drive.google.com/file/d/1nKdRYNWpvzk4sR2i6RakZUm4YrcXnPxh/view?usp=sharing Lecture 10: Electrical Characterization]
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Lecture 11: Optical Characterization
[https://drive.google.com/file/d/1nDRkdf7dgR5Lsr9Ab9f_HB3juA3RRDWg/view?usp=sharing Lecture 11: Optical Characterization]
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'''Module 8: Packaging and Assembly'''
'''Module 8: Packaging and Assembly'''
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Seatwork
Seatwork No. 4
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Lecture 12: Pacakaging
[https://drive.google.com/file/d/1vRnDg227XU15tONNkc5v2X6Y30MJ30dH/view?usp=sharing Lecture 12: Packaging]
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'''Module 8: Packaging and Assembly (continued)'''
'''Module 8: Packaging and Assembly (continued)'''
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Lecture 13: Assembly
[https://drive.google.com/file/d/1K9fZ0bwYRZTsj10BUNcXZWJDh_OY9BPU/view?usp=sharing Lecture 13: Assembly]
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Lecture 14: MUMPS and CMOS Processes
[https://docs.google.com/presentation/d/15McOgSjlWMZoTIyZ0NBsuRKR8xJudQaz/edit?usp=sharing&ouid=117156915761919838910&rtpof=true&sd=true Lecture 14: MUMPS and CMOS Processes]
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'''Module 9: Introduction to MEMS'''
'''Module 9: Introduction to MEMS'''
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Lecture 15: Fundamentals of MEMS
HOLIDAY
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Lecture 16: Applications of MEMS
[https://drive.google.com/file/d/1EQiK-FX9uruQzidnnxePJzwNpt-xeGXX/view?usp=sharing Lecture 15: Introduction to MEMS]
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'''Module 10: Final Project'''
'''Module 10: Final Project'''
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Lecture 17: Synthesis of Fabrication Processes: The MUMPS Fabrication Process
[https://drive.google.com/file/d/1DJyrTZzcmoqHQO-N2aK43WyihIe2NSLx/view?usp=sharing Lecture 16: Cantilevers in MEMS]
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Project Introduction
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Latest revision as of 09:34, 10 April 2025

ECE 197U / EE 298U Introduction to Microfabrication and MEMS

  • 2nd Semester AY 2024-2025
  • 3 units lecture, 1 unit laboratory

Course Description

ECE 197U / EE 298U is designed to introduce students to the fundamentals of microfabrication and its applications in integrated circuits (ICs) and microelectromechanical systems (MEMS). The lectures discuss the theories behind standard microfabrication processes. The laboratory class then demonstrates these theories through hands-on experiments using actual microfabrication materials and equipment. Pre-req: Must have taken EEE 41 (Introduction to Semiconductor Devices and Circuits) or EEE 131 (Electronic Devices and Circuits) or equivalent courses

Course Outcomes

At the end of this course, students should be able to:

  1. Understand fundamental principles of device microfabrication and technology
  2. Appreciate cleanroom operation, laboratory safety, and chemical handling principles
  3. Learn the basics of the operation of fabrication equipment in the UP Diliman Microfabrication Facility
  4. Learn the fundamentals and applications of MEMS devices
  5. Create a fabrication process plan from existing MEMS devices in the literature

Lecture Schedule

Calendar Lecture Module Topic 1 Topic 2 Resources
Week 1 (01/20 - 01/24)

Module 1: Course Introduction

Lecture 0a: Course Introduction
Lecture 0b: Cleanroom Orientation

Lecture 1: Introduction to Microfabrication

Week 2 (01/27 - 01/31)

Module 2: Cleaning and Oxidation

Lecture 2: Microfabrication and MEMS in UPD

Lecture 3a: Silicon Fabrication
Lecture 3b: Cleaning Process

RCA Cleaning

Week 3 (02/03 - 02/07)

Module 3: Oxidation Process

Lecture 4: Oxidation Processes
(Guest Lecture: UPD DMMME Asst. Prof. Rogel Butalid)

Seatwork No. 1

Week 4 (02/10 - 02/14)

Module 4: Photolithography

Lecture 5: Photolithography Part 1

Lecture 6: Photolithography Part 2

Week 5 (02/17 - 02/21)

Module 5: Deposition Processes

Lecture 7: Wet Deposition Processes

Lecture 8: Dry Deposition Processes

MatE 197 Doping Lecture

Week 6 (02-24 - 02/28)

Module 5: Deposition Processes (continued)

HOLIDAY

Seatwork No. 2

Week 7 (03/03 - 03/07)

Module 6: Etching Processes

Lecture 9: Etching Processes

Seatwork No. 3

Week 8 (03/10 - 03/14)

Module 7: Characterization Processes

Lecture 10: Electrical Characterization

Lecture 11: Optical Characterization

Week 9 (03/17 - 03/21)

Module 8: Packaging and Assembly

Seatwork No. 4

Lecture 12: Packaging

Week 10 (03/24 - 03/28)

Module 8: Packaging and Assembly (continued)

Lecture 13: Assembly

Lecture 14: MUMPS and CMOS Processes

Week 11 (03/31 - 04/04)

Module 9: Introduction to MEMS

HOLIDAY

Lecture 15: Introduction to MEMS

Week 12 (04/07 - 04/11)

Module 10: Final Project

Lecture 16: Cantilevers in MEMS

Project Introduction

Week 13 (04/14 - 04/18)

Lenten Break

Weeks 14-16 (04/21 - 05/09)

Final Project Consultations

Finals Week (05/26 - 05/30)

Final Project Presentations

References

  • R. Jaeger, Introduction to Microelectronic Fabrication, Prentice Hall, 2002.
  • S. Senturia, Microsystem Design, Springer, 2004.
  • W. Schomburg, Introduction to Microsystem Design, Springer, 2011.
  • K. Lee, Principles of Microelectromechanical Systems, Wiley-IEEE, 2011.
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