Introduction to Microfabrication and MEMS (January 2025): Difference between revisions

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ECE 197U / EE 298U is designed to introduce students to the fundamentals of microfabrication and its applications in integrated circuits (ICs) and microelectromechanical systems (MEMS). The lectures discuss the theories behind standard microfabrication processes. The laboratory class then demonstrates these theories through hands-on experiments using actual microfabrication materials and equipment. Pre-req: Must have taken EEE 41 (Introduction to Semiconductor Devices and Circuits) or EEE 131 (Electronic Devices and Circuits) or equivalent courses
ECE 197U / EE 298U is designed to introduce students to the fundamentals of microfabrication and its applications in integrated circuits (ICs) and microelectromechanical systems (MEMS). The lectures discuss the theories behind standard microfabrication processes. The laboratory class then demonstrates these theories through hands-on experiments using actual microfabrication materials and equipment. Pre-req: Must have taken EEE 41 (Introduction to Semiconductor Devices and Circuits) or EEE 131 (Electronic Devices and Circuits) or equivalent courses


== Course Description ==
== Course Outcomes ==
At the end of this course, students should be able to:
At the end of this course, students should be able to:
# Understand fundamental principles of device microfabrication and technology
# Understand fundamental principles of device microfabrication and technology
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! scope="col"| Topic 1
! scope="col"| Topic 1
! scope="col"| Topic 2
! scope="col"| Topic 2
! scope="col"| Resources
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| style="text-align:center;" | Week 1 (01/20 - 01/24)
| style="text-align:center;" | Week 1 (01/20 - 01/24)
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'''Module 1: Course Introduction'''
'''Module 1: Course Introduction'''
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Lecture 0: Course Introduction
[https://drive.google.com/file/d/15lgRKbLNgP7yvEsZKrMGsaezMWHq2uDk/view?usp=sharing Lecture 0a: Course Introduction]<br>
[https://drive.google.com/file/d/1zhmHOs3rIS02LsWwTGwx2wIoYWHHEQ5A/view?usp=drive_link Lecture 0b: Cleanroom Orientation]
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Lecture 1: Introduction to Microfabrication
[https://drive.google.com/file/d/1ZLKizDyjc2tkmXTSxLbwwIRgT1DbXERD/view?usp=sharing Lecture 1: Introduction to Microfabrication]
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| style="text-align:center;" | Week 2 (01/27 - 01/31)
| style="text-align:center;" | Week 2 (01/27 - 01/31)
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'''Module 2: Cleaning and Oxidation'''
'''Module 2: Cleaning and Oxidation'''
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Lecture 2: Microfabrication and MEMS in UPD
[https://drive.google.com/file/d/13gkETbiL3nfEkCFypy2ASMZHkJwTG11v/view?usp=drive_link Lecture 2: Microfabrication and MEMS in UPD]
[https://drive.google.com/file/d/13gkETbiL3nfEkCFypy2ASMZHkJwTG11v/view?usp=sharing slides]
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[https://drive.google.com/file/d/1ztZ_l3BtWUG9EsoNeXN6CtK1OBDHGD44/view?usp=drive_link Lecture 3a: Silicon Fabrication]<br>
[https://drive.google.com/file/d/1TPqJx0rXsRCAldNX-0L8gzNb3GIJfqcC/view?usp=drive_link Lecture 3b: Cleaning Process]
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Lecture 3: Cleaning Process
[https://drive.google.com/file/d/1gcqnuWbfJG2JjJab8fkXzcvAQFVx1A-q/view?usp=drive_link RCA Cleaning]
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| style="text-align:center;" | Week 3 (02/03 - 02/07)
| style="text-align:center;" | Week 3 (02/03 - 02/07)
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'''Module 3: Oxidation Process'''
'''Module 3: Oxidation Process'''
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Lecture 5: Oxidation Processes
Lecture 4: Oxidation Processes <br>
(Guest Lecture: UPD DMMME Asst. Prof. Rogel Butalid)
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Seatwork
Seatwork
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| style="text-align:center;" | Week 4 (02/10 - 02/14)
| style="text-align:center;" | Week 4 (02/10 - 02/14)
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Lecture 6: Photolithography Part 2
Lecture 6: Photolithography Part 2
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| style="text-align:center;" | Week 5 (02/17 - 02/21)
| style="text-align:center;" | Week 5 (02/17 - 02/21)
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Lecture 7: Wet Deposition Processes
Lecture 7: Wet Deposition Processes
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| style="text-align:center;" | Week 6 (02-24 - 02/28)
| style="text-align:center;" | Week 6 (02-24 - 02/28)
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Lecture 8: Dry Deposition Processes
Lecture 8: Dry Deposition Processes
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| style="text-align:center;" | Week 7 (03/03 - 03/07)
| style="text-align:center;" | Week 7 (03/03 - 03/07)
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Seatwork
Seatwork
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| style="text-align:center;" | Week 8 (03/10 - 03/14)
| style="text-align:center;" | Week 8 (03/10 - 03/14)
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Lecture 11: Optical Characterization
Lecture 11: Optical Characterization
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| style="text-align:center;" | Week 9 (03/17 - 03/21)
| style="text-align:center;" | Week 9 (03/17 - 03/21)
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Lecture 12: Pacakaging
Lecture 12: Pacakaging
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| style="text-align:center;" | Week 10 (03/24 - 03/28)
| style="text-align:center;" | Week 10 (03/24 - 03/28)
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Lecture 14: MUMPS and CMOS Processes
Lecture 14: MUMPS and CMOS Processes
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| style="text-align:center;" | Week 11 (03/31 - 04/04)
| style="text-align:center;" | Week 11 (03/31 - 04/04)
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Lecture 16: Applications of MEMS
Lecture 16: Applications of MEMS
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| style="text-align:center;" | Week 12 (04/07 - 04/11)
| style="text-align:center;" | Week 12 (04/07 - 04/11)
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Lecture 17: Synthesis of Fabrication Processes: The MUMPS Fabrication Process
Lecture 17: Synthesis of Fabrication Processes: The MUMPS Fabrication Process
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'''Lenten Break'''  
'''Lenten Break'''  
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'''Final Project Consultations'''
'''Final Project Consultations'''
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'''Final Project Presentations'''  
'''Final Project Presentations'''  
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Latest revision as of 09:01, 6 February 2025

ECE 197U / EE 298U Introduction to Microfabrication and MEMS

  • 2nd Semester AY 2024-2025
  • 3 units lecture, 1 unit laboratory

Course Description

ECE 197U / EE 298U is designed to introduce students to the fundamentals of microfabrication and its applications in integrated circuits (ICs) and microelectromechanical systems (MEMS). The lectures discuss the theories behind standard microfabrication processes. The laboratory class then demonstrates these theories through hands-on experiments using actual microfabrication materials and equipment. Pre-req: Must have taken EEE 41 (Introduction to Semiconductor Devices and Circuits) or EEE 131 (Electronic Devices and Circuits) or equivalent courses

Course Outcomes

At the end of this course, students should be able to:

  1. Understand fundamental principles of device microfabrication and technology
  2. Appreciate cleanroom operation, laboratory safety, and chemical handling principles
  3. Learn the basics of the operation of fabrication equipment in the UP Diliman Microfabrication Facility
  4. Learn the fundamentals and applications of MEMS devices
  5. Create a fabrication process plan from existing MEMS devices in the literature

Lecture Schedule

Calendar Lecture Module Topic 1 Topic 2 Resources
Week 1 (01/20 - 01/24)

Module 1: Course Introduction

Lecture 0a: Course Introduction
Lecture 0b: Cleanroom Orientation

Lecture 1: Introduction to Microfabrication

Week 2 (01/27 - 01/31)

Module 2: Cleaning and Oxidation

Lecture 2: Microfabrication and MEMS in UPD

Lecture 3a: Silicon Fabrication
Lecture 3b: Cleaning Process

RCA Cleaning

Week 3 (02/03 - 02/07)

Module 3: Oxidation Process

Lecture 4: Oxidation Processes
(Guest Lecture: UPD DMMME Asst. Prof. Rogel Butalid)

Seatwork

Week 4 (02/10 - 02/14)

Module 4: Photolithography

Lecture 5: Photolithography Part 1

Lecture 6: Photolithography Part 2

Week 5 (02/17 - 02/21)

Module 5: Deposition Processes

Seatwork

Lecture 7: Wet Deposition Processes

Week 6 (02-24 - 02/28)

Module 5: Deposition Processes (continued)

HOLIDAY

Lecture 8: Dry Deposition Processes

Week 7 (03/03 - 03/07)

Module 6: Etching Processes

Lecture 9: Etching Processes

Seatwork

Week 8 (03/10 - 03/14)

Module 7: Characterization Processes

Lecture 10: Electrical Characterization

Lecture 11: Optical Characterization

Week 9 (03/17 - 03/21)

Module 8: Packaging and Assembly

Seatwork

Lecture 12: Pacakaging

Week 10 (03/24 - 03/28)

Module 8: Packaging and Assembly (continued)

Lecture 13: Assembly

Lecture 14: MUMPS and CMOS Processes

Week 11 (03/31 - 04/04)

Module 9: Introduction to MEMS

Lecture 15: Fundamentals of MEMS

Lecture 16: Applications of MEMS

Week 12 (04/07 - 04/11)

Module 10: Final Project

Lecture 17: Synthesis of Fabrication Processes: The MUMPS Fabrication Process

Week 13 (04/14 - 04/18)

Lenten Break

Weeks 14-16 (04/21 - 05/09)

Final Project Consultations

Finals Week (05/26 - 05/30)

Final Project Presentations

References

  • R. Jaeger, Introduction to Microelectronic Fabrication, Prentice Hall, 2002.
  • S. Senturia, Microsystem Design, Springer, 2004.
  • W. Schomburg, Introduction to Microsystem Design, Springer, 2011.
  • K. Lee, Principles of Microelectromechanical Systems, Wiley-IEEE, 2011.
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