Introduction to Microfabrication and MEMS (January 2025): Difference between revisions
(Created page with "'''ECE 197U / EE 298U Introduction to Microfabrication and MEMS''' * 2nd Semester AY 2024-2025 * 3 units lecture, 1 unit laboratory == Course Description == ECE 197U / EE 298U is designed to introduce students to the fundamentals of microfabrication and its applications in integrated circuits (ICs) and microelectromechanical systems (MEMS). The lectures discuss the theories behind standard microfabrication processes. The laboratory class then demonstrates these theories...") |
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| style="text-align:center;" | Week 1 (01/20 - 01/24) | | style="text-align:center;" | Week 1 (01/20 - 01/24) | ||
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Lecture 1: Introduction to Microfabrication | Lecture 1: Introduction to Microfabrication | ||
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| style="text-align:center;" | Week 2 (01/27 - 01/31) | | style="text-align:center;" | Week 2 (01/27 - 01/31) | ||
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Lecture 3: Cleaning Process | Lecture 3: Cleaning Process | ||
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Seatwork | Seatwork | ||
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Lecture 6: Photolithography Part 2 | Lecture 6: Photolithography Part 2 | ||
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Lecture 7: Wet Deposition Processes | Lecture 7: Wet Deposition Processes | ||
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| style="text-align:center;" | Week 6 (02-24 - 02/28) | | style="text-align:center;" | Week 6 (02-24 - 02/28) | ||
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Lecture 8: Dry Deposition Processes | Lecture 8: Dry Deposition Processes | ||
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Lecture 11: Optical Characterization | Lecture 11: Optical Characterization | ||
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| style="text-align:center;" | Week 9 (03/17 - 03/21) | | style="text-align:center;" | Week 9 (03/17 - 03/21) | ||
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Lecture 12: Pacakaging | Lecture 12: Pacakaging | ||
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Lecture 14: MUMPS and CMOS Processes | Lecture 14: MUMPS and CMOS Processes | ||
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| style="text-align:center;" | Week 11 (03/31 - 04/04) | | style="text-align:center;" | Week 11 (03/31 - 04/04) | ||
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Lecture 16: Applications of MEMS | Lecture 16: Applications of MEMS | ||
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Lecture 17: Synthesis of Fabrication Processes: The MUMPS Fabrication Process | Lecture 17: Synthesis of Fabrication Processes: The MUMPS Fabrication Process | ||
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'''Lenten Break''' | '''Lenten Break''' | ||
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'''Final Project Consultations''' | '''Final Project Consultations''' | ||
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'''Final Project Presentations''' | '''Final Project Presentations''' | ||
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Revision as of 17:23, 30 January 2025
ECE 197U / EE 298U Introduction to Microfabrication and MEMS
- 2nd Semester AY 2024-2025
- 3 units lecture, 1 unit laboratory
Course Description
ECE 197U / EE 298U is designed to introduce students to the fundamentals of microfabrication and its applications in integrated circuits (ICs) and microelectromechanical systems (MEMS). The lectures discuss the theories behind standard microfabrication processes. The laboratory class then demonstrates these theories through hands-on experiments using actual microfabrication materials and equipment. Pre-req: Must have taken EEE 41 (Introduction to Semiconductor Devices and Circuits) or EEE 131 (Electronic Devices and Circuits) or equivalent courses
Course Description
At the end of this course, students should be able to:
- Understand fundamental principles of device microfabrication and technology
- Appreciate cleanroom operation, laboratory safety, and chemical handling principles
- Learn the basics of the operation of fabrication equipment in the UP Diliman Microfabrication Facility
- Learn the fundamentals and applications of MEMS devices
- Create a fabrication process plan from existing MEMS devices in the literature
Lecture Schedule
| Calendar | Lecture Module | Topic 1 | Topic 2 |
|---|---|---|---|
| Week 1 (01/20 - 01/24) |
Module 1: Course Introduction |
Lecture 0: Course Introduction |
Lecture 1: Introduction to Microfabrication |
| Week 2 (01/27 - 01/31) |
Module 2: Cleaning and Oxidation |
Lecture 2: Microfabrication and MEMS in UPD |
Lecture 3: Cleaning Process |
| Week 3 (02/03 - 02/07) |
Module 3: Oxidation Process |
Lecture 5: Oxidation Processes |
Seatwork |
| Week 4 (02/10 - 02/14) |
Module 4: Photolithography |
Lecture 5: Photolithography Part 1 |
Lecture 6: Photolithography Part 2 |
| Week 5 (02/17 - 02/21) |
Module 5: Deposition Processes |
Seatwork |
Lecture 7: Wet Deposition Processes |
| Week 6 (02-24 - 02/28) |
Module 5: Deposition Processes (continued) |
HOLIDAY |
Lecture 8: Dry Deposition Processes |
| Week 7 (03/03 - 03/07) |
Module 6: Etching Processes |
Lecture 9: Etching Processes |
Seatwork |
| Week 8 (03/10 - 03/14) |
Module 7: Characterization Processes |
Lecture 10: Electrical Characterization |
Lecture 11: Optical Characterization |
| Week 9 (03/17 - 03/21) |
Module 8: Packaging and Assembly |
Seatwork |
Lecture 12: Pacakaging |
| Week 10 (03/24 - 03/28) |
Module 8: Packaging and Assembly (continued) |
Lecture 13: Assembly |
Lecture 14: MUMPS and CMOS Processes |
| Week 11 (03/31 - 04/04) |
Module 9: Introduction to MEMS |
Lecture 15: Fundamentals of MEMS |
Lecture 16: Applications of MEMS |
| Week 12 (04/07 - 04/11) |
Module 10: Final Project |
Lecture 17: Synthesis of Fabrication Processes: The MUMPS Fabrication Process |
|
| Week 13 (04/14 - 04/18) |
Lenten Break |
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| Weeks 14-16 (04/21 - 05/09) |
Final Project Consultations |
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| Finals Week (05/26 - 05/30) |
Final Project Presentations |
References
- R. Jaeger, Introduction to Microelectronic Fabrication, Prentice Hall, 2002.
- S. Senturia, Microsystem Design, Springer, 2004.
- W. Schomburg, Introduction to Microsystem Design, Springer, 2011.
- K. Lee, Principles of Microelectromechanical Systems, Wiley-IEEE, 2011.